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Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers

United States Patent

January 18, 2005
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
Figure errors are corrected on optical or other precision surfaces by changing the local density of material in a zone at or near the surface. Optical surface height is correlated with the localized density of the material within the same region. A change in the height of the optical surface can then be caused by a change in the localized density of the material at or near the surface.
Taylor; John S. (Livermore, CA), Folta; James A. (Livermore, CA), Montcalm; Claude (Fort Collins, CO)
EUV Limited Liability Corporation (Santa Clara, CA)
10/ 086,922
March 1, 2002
The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG-48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.