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Inspection system calibration methods

United States Patent

December 28, 2004
View the Complete Patent at the US Patent & Trademark Office
Idaho National Laboratory - Visit the Technology Transfer and Commercialization Office Website
An inspection system calibration method includes producing two sideband signals of a first wavefront; interfering the two sideband signals in a photorefractive material, producing an output signal therefrom having a frequency and a magnitude; and producing a phase modulated operational signal having a frequency different from the output signal frequency, a magnitude, and a phase modulation amplitude. The method includes determining a ratio of the operational signal magnitude to the output signal magnitude, determining a ratio of a 1st order Bessel function of the operational signal phase modulation amplitude to a 0th order Bessel function of the operational signal phase modulation amplitude, and comparing the magnitude ratio to the Bessel function ratio.
Deason; Vance A. (Idaho Falls, ID), Telschow; Kenneth L. (Idaho Falls, ID)
Bechtel BWXT Idaho, LLC (Idaho Falls, ID)
10/ 267,320
October 8, 2002
GOVERNMENT RIGHTS This invention was made with United States government support under Contract No. DE-AC07-99ID13727 between the U.S. Department of Energy and Bechtel BWXT Idaho, LLC. The United States government has certain rights in this invention.