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Universal EUV in-band intensity detector

United States Patent

August 24, 2004
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Extreme ultraviolet light is detected using a universal in-band detector for detecting extreme ultraviolet radiation that includes: (a) an EUV sensitive photodiode having a diode active area that generates a current responsive to EUV radiation; (b) one or more mirrors that reflects EUV radiation having a defined wavelength(s) to the diode active area; and (c) a mask defining a pinhole that is positioned above the diode active area, wherein EUV radiation passing through the pinhole is restricted substantially to illuminating the diode active area.
Berger; Kurt W. (Livermore, CA)
EUV, LLC (Santa Clara, CA)
10/ 301,080
November 21, 2002
This invention was made with Government support under Contract No. DE-AC04-94-AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights to the invention.