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Method to fabricate silicon chromatographic column comprising fluid ports

United States Patent

March 2, 2004
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
Manginell; Ronald P. (Albuquerque, NM), Frye-Mason; Gregory C. (Cedar Crest, NM), Heller; Edwin J. (Albuquerque, NM), Adkins; Douglas R. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
10/ 167,238
June 10, 2002
GOVERNMENT RIGHTS This invention was made with Government support under Contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.