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Low-cost method for producing extreme ultraviolet lithography optics

United States Patent

October 21, 2003
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
Spherical and non-spherical optical elements produced by standard optical figuring and polishing techniques are extremely expensive. Such surfaces can be cheaply produced by diamond turning; however, the roughness in the diamond turned surface prevent their use for EUV lithography. These ripples are smoothed with a coating of polyimide before applying a 60 period Mo/Si multilayer to reflect a wavelength of 134 .ANG. and have obtained peak reflectivities close to 63%. The savings in cost are about a factor of 100.
Folta; James A. (Livermore, CA), Montcalm; Claude (Fort Collins, CO), Taylor; John S. (Livermore, CA), Spiller; Eberhard A. (Mt. Kisco, NY)
The Regents of the University of California (Oakland, CA)
09/ 940,099
August 27, 2001
The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.