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Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films

United States Patent

September 30, 2003
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Novel ligated compounds of tin, titanium, and zinc are useful as metal oxide CVD precursor compounds without the detriments of extreme reactivity yet maintaining the ability to produce high quality metal oxide coating by contact with heated substrates.
Giolando; Dean M. (Toledo, OH)
First Solar, LLC (Perrysburg, OH)
10/ 150,561
May 21, 2002
This invention was made with Government support under NREL Subcontract No. ZAK-8-17619-17, Prime Contract No. DE-AC36-98GO10337 awarded by the Department of Energy. The government has certain rights in the invention.