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Damascene fabrication of nonplanar microcoils

United States Patent

June 17, 2003
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A process for fabricating coils using a Damascene process uses a curved substrate having a surface extending along and about an axis made of a first material. A groove is formed in the curved surface along and around said axis, and the groove is filled with a second material that is different from the first material to form a coil of second material in said first material. Excess second material is then removed from the surface of the first material, leaving the coil of second material in the groove.
Adams; David P. (Albuquerque, NM), Vasile; Michael J. (Ruston, LA)
Sandia Corporation (Albuquerque, NM)
09/ 733,396
December 8, 2000
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.