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Polished polymide substrate

United States Patent

May 13, 2003
View the Complete Patent at the US Patent & Trademark Office
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
Farah; John (Attleboro, MA), Sudarshanam; Venkatapuram S. (Big Flats, NY)
09/ 292,432
April 15, 1999
GOVERNMENT FUNDING This invention was supported by Department of Energy Grant No. DE-FG02-90ER81033, and the government has certain rights to the invention.