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Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing

United States Patent

6,555,270
April 29, 2003
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
Bates; John B. (Marietta, GA)
Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
09/ 818,465
20010014423
March 27, 2001
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY-SPONSORED RESEARCH AND DEVELOPMENT This invention was made with Government support under contract No. DE-AC05-960R22464 awarded by the United States Department of Energy to Lockheed Martin Energy Research Corp., and the Government has certain rights in this invention.