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Alternative backing up pump for turbomolecular pumps

United States Patent

April 22, 2003
View the Complete Patent at the US Patent & Trademark Office
Thomas Jefferson National Accelerator Facility - Visit the Technology Review Committee Website
As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volumes to water with the water then being cryo-pumped to a low pressure of below about 1.e.sup.-3 Torr at K. Cryo-pumping is achieved using a low cost Kleemenco cycle cryocooler, a somewhat more expensive thermoelectric cooler, a Venturi cooler or a similar device to achieve the required minimization of hydrogen partial pressure.
Myneni; Ganapati Rao (Yorktown, VA)
Southeastern Universities Research Assn. (Newport News, VA)
09/ 941,344
August 29, 2001
The United States of America may have certain rights to this invention under Management and Operating Contract No. DE-AC05-84ER 40150 from the Department of Energy.