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Method and apparatus for self-calibration of capacitive sensors

United States Patent

6,545,495
April 8, 2003
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A method for determining operational characteristics of capacitive sensors adapted for self-calibration includes the steps of providing at least one capacitive sensor having a suspended element and a pick-up plate. An AC input signal is applied to one of the plates, while force is provided between the plates, the force capable of variation. At least one operational characteristic of capacitive sensors can be determined, such as the suspended element spring constant and the gap distance between the plates. A capacitive sensor system adapted for self-calibration includes at least one capacitive sensor having a suspended element and a pick-up plate, a self-testing and calibration network, and a structure for generating force between the plates, the force capable of variation.
Warmack; Robert J. (Knoxville, TN), Britton, Jr.; Charles L. (Alcoa, TN)
UT-Battelle, LLC (Oak Ridge, TN)
09/ 837,142
20020158637
April 17, 2001
The United States Government has rights in this invention pursuant to Contract No. DE-AC05-00OR22725 between the United States Department of Energy and UT-Battelle, LLC.