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Integrated optical interrogation of micro-structures

United States Patent

February 25, 2003
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
The invention is an integrated optical sensing element for detecting and measuring changes in position or deflection. A deflectable member, such as a microcantilever, is configured to receive a light beam. A waveguide, such as an optical waveguide or an optical fiber, is positioned to redirect light towards the deflectable member. The waveguide can be incorporated into the deflectable member or disposed adjacent to the deflectable member. Means for measuring the extent of position change or deflection of the deflectable member by receiving the light beam from the deflectable member, such as a photodetector or interferometer, receives the reflected light beam from the deflectable member. Changes in the light beam are correlated to the changes in position or deflection of the deflectable member. A plurality of deflectable members can be arranged in a matrix or an array to provide one or two-dimensional imaging or sensing capabilities.
Evans, III; Boyd M. (Oak Ridge, TN), Datskos; Panagiotis G. (Knoxville, TN), Rajic; Slobodan (Knoxville, TN)
UT-Battelle, LLC (Oak Ridge, TN)
09/ 397,552
September 16, 1999
This invention was made with Government support under Contract No. DE-AC05-96OR22464 awarded by the U.S. Department of Energy to Lockheed Martin Energy Research Corp., and the Government has certain rights in this invention.