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Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy

United States Patent

December 24, 2002
View the Complete Patent at the US Patent & Trademark Office
Systems and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a pluralitly of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The systems and methods provide advantages including the avoidance of space-charge blow-up.
Thomas; Clarence E. (Knoxville, TN), Baylor; Larry R. (Farragut, TN), Voelkl; Edgar (Oak Ridge, TN), Simpson; Michael L. (Knoxville, TN), Paulus; Michael J. (Knoxville, TN), Lowndes; Douglas H. (Knoxville, TN), Whealton; John H. (Oak Ridge, TN), Whitson; John C. (Clinton, TN), Wilgen; John B. (Oak Ridge, TN)
UT-Battelle (Oakridge, TN)
09/ 368,919
August 5, 1999
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY-SPONSORED RESEARCH AND DEVELOPMENT This invention was made with United States government support awarded by the United States Department of Energy under contract to Lockheed Martin Energy Research Corporation and/or Lockheed Martin Energy Systems Corporation. The United States has certain rights in this invention.