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Apparatus and method for detecting electromagnetic radiation using electron photoemission in a micromechanical sensor

United States Patent

September 3, 2002
View the Complete Patent at the US Patent & Trademark Office
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A micromechanical sensor and method for detecting electromagnetic radiation involve producing photoelectrons from a metal surface in contact with a semiconductor. The photoelectrons are extracted into the semiconductor, which causes photo-induced bending. The resulting bending is measured, and a signal corresponding to the measured bending is generated and processed. A plurality of individual micromechanical sensors can be arranged in a two-dimensional matrix for imaging applications.
Datskos; Panagiotis G. (Knoxville, TN), Rajic; Slobodan (Knoxville, TN), Datskou; Irene C. (Knoxville, TN), Egert; Charles M. (Oak Ridge, TN)
UT-Battelle, LLC (Oak Ridge, TN)
09/ 396,695
September 15, 1999
GOVERNMENT LICENSE RIGHTS STATEMENT This invention was made with Government support under Contract No. DE-AC05-96OR22464 awarded by the U.S. Department of Energy to Lockheed Martin Energy Research Corp., and the Government has certain rights in this invention.