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Electrostatic apparatus for measurement of microfracture strength

United States Patent

July 23, 2002
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.
de Boer; Maarten (Albuquerque, NM), Bitsie; Fernando (Albuquerque, NM), Jensen; Brian D. (Ann Arbor, MI)
Sandia Corporation (Albuquerque, NM)
09/ 665,980
September 20, 2000
GOVERNMENT RIGHTS This invention was made with Government support under Contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.