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Microdevice having interior cavity with high aspect ratio surface features and associated methods of manufacture and use

United States Patent

February 12, 2002
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A microdevice having interior cavity with high aspect ratio features and ultrasmooth surfaces, and associated method of manufacture and use is described. An LIGA-produced shaped bit is used to contour polish the surface of a sacrificial mandrel. The contoured sacrificial mandrel is subsequently coated with a structural material and the mandrel removed to produce microdevices having micrometer-sized surface features and sub-micrometer RMS surface roughness.
Morales; Alfredo M. (Pleasanton, CA)
Sandia Corporation (Livermore, CA)
09/ 568,494
May 9, 2000
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.