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Plasma treatment for producing electron emitters

United States Patent

November 20, 2001
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
Plasma treatment for producing carbonaceous field emission electron emitters is disclosed. A plasma of ions is generated in a closed chamber and used to surround the exposed surface of a carbonaceous material. A voltage is applied to an electrode that is in contact with the carbonaceous material. This voltage has a negative potential relative to a second electrode in the chamber and serves to accelerate the ions toward the carbonaceous material and provide an ion energy sufficient to etch the exposed surface of the carbonaceous material but not sufficient to result in the implantation of the ions within the carbonaceous material. Preferably, the ions used are those of an inert gas or an inert gas with a small amount of added nitrogen.
Coates; Don Mayo (Santa Fe, NM), Walter; Kevin Carl (Los Alamos, NM)
E.I. duPont de Nemours and Co. (Wilmington, DE), The Regents of the University of California (Oakland, CA)
09/ 582,837
June 30, 2000
This invention provides a plasma treatment for producing field emission electron emitters. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).