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Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy

United States Patent

July 10, 2001
View the Complete Patent at the US Patent & Trademark Office
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A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.
Hou; Hong Q. (Albuquerque, NM), Coltrin; Michael E. (Albuquerque, NM), Choquette; Kent D. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
09/ 191,070
November 12, 1998
STATEMENT REGARDING FEDERALLY FUNDED RESEARCH OR DEVELOPMENT This invention was made with Government support under Contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.