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Phase-shifting point diffraction interferometer grating designs

United States Patent

February 27, 2001
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
In a phase-shifting point diffraction interferometer, by sending the zeroth-order diffraction to the reference pinhole of the mask and the first-order diffraction to the test beam window of the mask, the test and reference beam intensities can be balanced and the fringe contrast improved. Additionally, using a duty cycle of the diffraction grating other than 50%, the fringe contrast can also be improved.
Naulleau; Patrick (Oakland, CA), Goldberg; Kenneth Alan (Berkeley, CA), Tejnil; Edita (San Carlos, CA)
The Regents of the University of California (Oakland, CA)
09/ 176,695
October 21, 1998
The U.S. Government has certain rights in this invention pursuant to Contract No. DE-AC03-76SF00098 between the United States Department of Energy and the University of California for operating Lawrence Berkeley National Laboratory.