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Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film

United States Patent

6,103,305
August 15, 2000
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film without significantly softening said film. The maximum annealing temperature is preferably on the order of 650.degree. C., a much lower value than is expected from the annealing behavior of other materials.
Friedmann; Thomas A. (Albuquerque, NM), Sullivan; John P. (Placitas, NM)
Sandia Corporation (Albuquerque, NM)
09/ 447,523
November 23, 1999
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.