Skip to Content
Find More Like This
Return to Search

Supplemental heating of deposition tooling shields

United States Patent

6,083,360
July 4, 2000
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A method of reducing particle generation from the thin coating deposited on the internal surfaces of a deposition chamber which undergoes temperature variation greater than 100.degree. C. comprising maintaining the temperature variation of the internal surfaces low enough during the process cycle to keep thermal expansion stresses between the coating and the surfaces under 500 MPa. For titanium nitride deposited on stainless steel, this means keeping temperature variations under approximately 70.degree. C. in a chamber that may be heated to over 350.degree. C. during a typical processing operation. Preferably, a supplemental heater is mounted behind the upper shield and controlled by a temperature sensitive element which provides feedback control based on the temperature of the upper shield.
Ohlhausen; James A. (Albuquerque, NM), Peebles; Diane E. (Albuquerque, NM), Hunter; John A. (Albuquerque, NM), Eckelmeyer; Kenneth H. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
09/ 289,145
April 8, 1999
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.