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Apparatus and method for the determination of grain size in thin films

United States Patent

6,038,026
March 14, 2000
View the Complete Patent at the US Patent & Trademark Office
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.
Maris; Humphrey J (Barrington, RI)
Brown University Research Foundation (Providence, RI)
09/ 110,886
July 7, 1998
STATEMENT OF GOVERNMENT RIGHTS This invention was made with Government support under Contract No. DE-FG02-86ER45267 awarded by the Department of Energy. The Government has certain rights in this invention.