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Capacitively coupled RF diamond-like-carbon reactor

United States Patent

6,037,016
March 14, 2000
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma within the reaction chamber for a sufficient period of time whereby diamond-like carbon is formed upon the non-conductive fiber, is provided together with a reactor chamber for deposition of diamond-like carbon upon a non-conductive fiber, including a vacuum chamber, a cathode assembly including a pair of electrically isolated opposingly parallel metal grids spaced apart at a distance of less than about 1 centimeter, an anode, a means of introducing a hydrocarbon gas into said vacuum chamber, and a means of generating a plasma within said vacuum chamber.
Devlin; David James (Los Alamos, NM), Coates; Don Mayo (Santa Fe, NM), Archuleta; Thomas Arthur (Espanola, NM), Barbero; Robert Steven (Santa Cruz, NM)
E.I. du Pont de Nemours and Company (Wilmington, DE), Regents of the University of California (Oakland, CA)
09/ 077,513
May 29, 1998
FIELD OF THE INVENTION The present invention relates to an apparatus for the coating of non-conductive fibers with diamond-like-carbon and to a process for the coating of non-conductive fibers with diamond-like-carbon. This invention is the result of a contract with the United States Department of Energy (Contract No. W-7405-ENG-36).