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Compton backscattered collmated X-ray source

United States Patent

6,035,015
March 7, 2000
View the Complete Patent at the US Patent & Trademark Office
SLAC National Accelerator Laboratory - Visit the Technology Transfer Website
A high-intensity, inexpensive and collimated x-ray source for applications such as x-ray lithography is disclosed. An intense pulse from a high power laser, stored in a high-finesse resonator, repetitively collides nearly head-on with and Compton backscatters off a bunched electron beam, having relatively low energy and circulating in a compact storage ring. Both the laser and the electron beams are tightly focused and matched at the interaction region inside the optical resonator. The laser-electron interaction not only gives rise to x-rays at the desired wavelength, but also cools and stabilizes the electrons against intrabeam scattering and Coulomb repulsion with each other in the storage ring. This cooling provides a compact, intense bunch of electrons suitable for many applications. In particular, a sufficient amount of x-rays can be generated by this device to make it an excellent and flexible Compton backscattered x-ray (CBX) source for high throughput x-ray lithography and many other applications.
Ruth; Ronald D. (Woodside, CA), Huang; Zhirong (Stanford, CA)
The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)
09/ 146,202
September 2, 1998
GOVERNMENT SUPPORT This invention was made with Government support under Contract No. DE-AC03-76SF00515 awarded by the Department of Energy. The Government has certain rights to this invention.