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Apparatus and method for measurement of the mechanical properties and electromigration of thin films

United States Patent

6,025,918
February 15, 2000
View the Complete Patent at the US Patent & Trademark Office
A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.
Maris; Humphrey J. (Barrington, RI)
Brown University Research Foundation (Providence, RI)
09/ 111,456
July 7, 1998
STATEMENT OF GOVERNMENT RIGHTS This invention was made with Government support under Contract No. DE-FG02-86ER45267 awarded by the Department of Energy. The Government has certain rights in this invention.