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Coordinated X-Y stage apparatus

United States Patent

6,016,607
January 25, 2000
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.
Morimoto; Alan K. (Albuquerque, NM), Kozlowski; David M. (Albuquerque, NM), Charles; Steven T. (Germantown, TN), Spalding; James A. (Springfield, KY)
Sandia Corporation (Albuquerque, NM)
09/ 301,500
April 28, 1999
GOVERNMENT RIGHTS The present invention was made with United States Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in this invention.