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Rigid thin windows for vacuum applications

United States Patent

6,002,202
December 14, 1999
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.
Meyer; Glenn Allyn (Danville, CA), Ciarlo; Dino R. (Livermore, CA), Myers; Booth Richard (Livermore, CA), Chen; Hao-Lin (Lafayette, CA), Wakalopulos; George (Pacific Palisades, CA)
The Regents of the University of California (Oakland, CA)
08/ 684,166
July 19, 1996
The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG-48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.