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Uncooled thin film pyroelectric IR detector with aerogel thermal isolation

United States Patent

5,949,071
September 7, 1999
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.
Ruffner; Judith A. (Albuquerque, NM), Bullington; Jeff A. (Albuquerque, NM), Clem; Paul G. (Albuquerque, NM), Warren; William L. (Albuquerque, NM), Brinker; C. Jeffrey (Albuquerque, NM), Tuttle; Bruce A. (Albuquerque, NM), Schwartz; Robert W. (Seneca, SC)
Sandia Corporation (Albuquerque, NM)
08/ 912,949
August 14, 1997
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with United States Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in this invention.