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Near field optical probe for critical dimension measurements

United States Patent

5,905,573
May 18, 1999
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A resonant planar optical waveguide probe for measuring critical dimensions on an object in the range of 100 nm and below. The optical waveguide includes a central resonant cavity flanked by Bragg reflector layers with input and output means at either end. Light is supplied by a narrow bandwidth laser source. Light resonating in the cavity creates an evanescent electrical field. The object with the structures to be measured is translated past the resonant cavity. The refractive index contrasts presented by the structures perturb the field and cause variations in the intensity of the light in the cavity. The topography of the structures is determined from these variations.
Stallard; Brian R. (Albuquerque, NM), Kaushik; Sumanth (Cambridge, MA)
Sandia Corporation (Albuquerque, NM)
08/ 955,997
October 22, 1997
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government support under Contract DEAC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.