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METHOD AND APPARATUS FOR MAKING DIAMOND-LIKE CARBON FILMS

United States Patent Application

20080305277
A1
View the Complete Application at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Ion-assisted plasma enhanced deposition of diamond-like carbon (DLC) films on the surface of photovoltaic solar cells is accomplished with a method and apparatus for controlling ion energy. The quality of DLC layers is fine-tuned by a properly biased system of special electrodes and by exact control of the feed gas mixture compositions. Uniform (with degree of non-uniformity of optical parameters less than 5%) large area (more than 110 cm.sup.2) DLC films with optical parameters varied within the given range and with stability against harmful effects of the environment are achieved.
PERN, FU-JANN (Golden, CO), TOURYAN, KENELL J. (Indian Hills, CO), PANOSYAN, Zh. R. (Yerevan, AM), GIPPIUS, ALEKSEY ALEKSEYEVICH (Moscow, RU)
12/ 188,104
August 7, 2008
CONTRACTUAL ORIGIN OF INVENTION [0002] The United States Government has rights in this invention pursuant to Contract No. DEAC36-99GO10337 between the U.S. Department of Energy and the National Renewable Energy Laboratory, a Division of Midwest Research Institute.