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Surface topography with X-ray reflection phase-contrast microscopy

United States Patent Application

20080181363
A1
View the Complete Application at the US Patent & Trademark Office
Argonne National Laboratory - Visit the Technology Development and Commercialization Website
A system and method for monitoring a surface or interfacial area. The system and method includes an intense X-ray beam directed to a surface or interface at a low angle to achieve specular reflection with phase contrast associated with an event, such as changing topography, chemistry or magnetic state being detected by a CCD. Upstream or downstream processing can be carried out with the X-ray phase contrast system.
Fenter, Paul (Naperville, IL), Yun, Wenbing (Walnut Creek, CA)
UChicago Argonne, LLC
11/ 657,805
January 25, 2007
[0001] This invention was made with government support under Contract No. W-31-109-ENG-38 awarded to the Department of Energy and the U.S. Government has certain rights in this invention.