Monolithic tetrahedra amorphous carbon (ta-C) nanoprobes and ta-C coated nanoprobes and methods for fabricating such nanoprobes are provided. The nanoprobes provide hard, wear-resistant, low friction, and chemically inert probes for use in such applications as atomic force microscopy, nanolithography and metrology.
STATEMENT OF GOVERNMENT RIGHTS
 Research ending was provided for this invention by the Department of Energy under grant number DE-FG02-02ER46016. The United States government has certain rights in this invention.