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MONOLITHIC ta-C NANOPROBES AND ta-C COATED NANOPROBES

United States Patent Application

20080142709
A1
View the Complete Application at the US Patent & Trademark Office
Monolithic tetrahedra amorphous carbon (ta-C) nanoprobes and ta-C coated nanoprobes and methods for fabricating such nanoprobes are provided. The nanoprobes provide hard, wear-resistant, low friction, and chemically inert probes for use in such applications as atomic force microscopy, nanolithography and metrology.
Sumant, Anirudha Vishwanath (Downers Grove, IL), Carpick, Robert William (Philadelphia, PA)
11/ 687,996
March 19, 2007
STATEMENT OF GOVERNMENT RIGHTS [0002] Research ending was provided for this invention by the Department of Energy under grant number DE-FG02-02ER46016. The United States government has certain rights in this invention.