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Epitaxial thin films

United States Patent Application

20070178227
A1
View the Complete Application at the US Patent & Trademark Office
Epitaxial thin films are formed on textured substrates. An electrode is formed on the exposed surface of the thin film; the textured substrate removed, and second electrode is formed on the thin film on the side opposite the first electrode. A capacitor is thereby formed.
Hunt, Andrew Tye (Atlanta, GA), Deshpande, Girish (Atlanta, GA), Lin, Wen-Yi (Ellington, CT), Hwang, Tzyy-Jiuan Jan (Alpharetta, GA)
11/ 452,591
June 15, 2006
GOVERNMENT CONTRACT [0002] The United States Government has rights in this invention pursuant to Contract No. F33615-98-C-5418 awarded by the United States Department of Defense, and Contract Nos. DE-FG02-97ER82345, ACQ-9-29612-01 and 4500011833 awarded by the United States Department of Energy.