An apparatus with a narrow slit chamber generates plasma having non-equilibrium characteristics and a brush-like shape at a temperature near room temperature and at a pressure of about one atmosphere. Plasma gas enters the narrow slit chamber. An external power source provides power to electrodes near the exit that excite the plasma gas and produce a plasma jet having a brush-like shape that exits the chamber. The apparatus operates with low power consumption, and the temperature of the plasma is low. Glow-to-arc transitions are prevented using a ballast resistor and appropriate plasma gases with the narrow slit chamber design. The brush-like shaped plasma extends beyond the exit of the chamber, and possesses the reactive features of low-pressure or non-equilibrium plasmas. The plasma brush apparatus can be used for plasma treatment, plasma cleaning, plasma deposition, plasma sterilization, and plasma decontamination of chemical and biological warfare agents.
STATEMENT REGARDING FEDERAL RIGHTS
 This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy. The government has certain rights in the invention.