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SENSING ANALYTICAL INSTRUMENT PARAMETERS, SPECIMEN CHARACTERISTICS, OR BOTH FROM SPARSE DATASETS

United States Patent Application

20180033591
A1
View the Complete Application at the US Patent & Trademark Office
Pacific Northwest National Laboratory - Visit the Technology Commercialization Program Website
Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.
Stanfill, Bryan A. (Richland, WA), Reehl, Sarah M. (Richland, WA), Johnson, Margaret C. (Cary, NC), Bramer, Lisa M. (Kennewick, WA), Browning, Nigel D. (Richland, WA), Stevens, Andrew J. (Richland, WA), Kovarik, Libor (West Richland, WA)
BATTELLE MEMORIAL INSTITUTE (Richland WA)
15/ 660,096
July 26, 2017
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT [0002] This invention was made with Government support under Contract DE-AC0576RL01830 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.