A bio-compatible electrical element including a high-dielectric amorphous Ti.sub.xAl.sub.1-xO.sub.y oxide alloy wherein a TiO.sub.2 layer is between the bio-compatible electrical element and a biological such as human environment. A continuous and substantially pinhole free dielectric amorphous Ti.sub.xAl.sub.1-xO.sub.y oxide alloy wherein x is in the range of from about 0.5 to about 0.7 and y is in the range of about 2 to about 3 and having a TiO.sub.2 layer exterior thereto formed into a passive element such as a capacitor or an active element such as a microchip is disclosed.
CONTRACTUAL ORIGIN OF THE INVENTION
 The United States Government has rights in this invention pursuant to Contract No. W-31-109-ENG-38 between the U.S. Department of Energy and The University of Chicago representing Argonne National Laboratory.