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Systems and Methods for Quality Control of a Periodic Structure

United States Patent Application

20180011031
A1
View the Complete Application at the US Patent & Trademark Office
Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.
Maznev, Alexei (Allston, MA), NELSON, Keith A. (Newton, MA), BENSAOULA, Abdelhak (Houston, TX), GANDHI, Jateen S. (Houston, TX), STOKES, Donna Washington (Friendswood, TX), FORREST, Rebecca Lynne (Houston, TX), SHIN, Hyun Doug (Cambridge, MA)
15/ 641,724
July 5, 2017
GOVERNMENT SUPPORT [0002] This invention was made with Government support under Grant No. DE-SC0001299 awarded by the Department of Energy. The Government has certain rights in the invention.