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METHOD FOR ELECTROCHEMICAL ROUGHENING OF THIN FILM ELECTRODES

United States Patent Application

20170350034
A1
View the Complete Application at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
The present invention relates to surface roughening methods and more particularly to a method for electrochemical roughening of thin film macro- and micro-electrodes. In one embodiment, an electrochemical etch template is formed comprising polymer particles adsorbed on a surface of a substrate to be roughened, followed by electrochemically etching of exposed regions of the substrate between the polymer particles in the electrochemical etch template so as to selectively roughen the surface of the substrate. In another embodiment, a surface of the electrode is immersed in either a adsorbing acidic solution, such as sulfuric acid, or a non-adsorbing acidic solution, such as perchloric acid, followed by electrochemically pulse etching the surface of the substrate at a narrow frequency range for adsorbing acidic solutions, or at a wide frequency range for non-adsorbing acidic solutions.
Ivanovskaya, Anna Nikolaevna (Mountain View, CA), Tolosa, Vanessa (Oakland, CA), Dahlquist, Dylan (Folsom, CA), Pannu, Satinderpall S. (Pleasanton, CA), Shah, Kedar G. (San Francisco, CA), Tooker, Angela C. (Dublin, CA), Qian, Fang (Santa Cruz, CA)
15/ 615,648
June 6, 2017
FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT [0001] The United States Government has rights in this invention pursuant to Contract No. DE-AC52-07NA27344 between the United States Department of Energy and Lawrence Livermore National Security, LLC for the operation of Lawrence Livermore National Laboratory.