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Process for improvement of IBAD texturing on substrates in a continuous mode

United States Patent Application

20070026136
A1
View the Complete Application at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
A process is disclosed of preparing a template layer of a biaxially oriented material by ion beam assisted deposition upon a length of a substrate within a vacuum deposition chamber, by passing a length of substrate across a cooling block within a vacuum deposition chamber, with the cooling block configured to contact the substrate and passing a cooled liquid or gas through said cooling block during deposition of said layer of biaxially oriented material by ion beam assisted deposition upon said length of substrate. Also, a process is disclosed of preparing a template layer of a biaxially oriented material by ion beam assisted deposition upon a length of a substrate within a vacuum deposition chamber, by contacting a substrate with a cooled gas from the group of argon, oxygen, nitrogen during the ion beam assisted deposition of the biaxially oriented material within the vacuum deposition chamber, the cooled gas exiting a series of openings in a cooling block within the vacuum deposition chamber, the cooling block configured to contact the substrate.
Arendt, Paul N. (Los Alamos, NM), DePaula, Raymond F. (Santa Fe, NM), Stan, Liliana (Los Alamos, NM), Usov, Igor O. (Los Alamos, NM), Groves, James R. (Los Alamos, NM)
The Regents of the University of California
11/ 191,362
July 27, 2005
STATEMENT REGARDING FEDERAL RIGHTS [0001] This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy. The government has certain rights in the invention.