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APPARATUS AND METHOD FOR COATING BULK QUANTITIES OF SOLID PARTICLES

United States Patent Application

20170137940
A1
View the Complete Application at the US Patent & Trademark Office
An apparatus and method is described to coat small and large quantities of solid particles using atomic layer deposition, with increased material utilization and decreased cycle times. The resulting higher coating efficiency ALD process is achieved by a controlled pressure differential acting across a rotating porous vessel that contains a plurality of solid particles. The apparatus is comprised of two coaxial cylindrical porous vessels with a means for one to rotate, and a two stage rotary feedthrough with a specialized hollowed out shaft, which enables both rotation of the vessel and reactant, purge, and product gas transport across a particle bed that undergoes mixing.
Zeberoff, Anthony F. (Brookfield, CT), Roeder, Jeffrey F. (Bethel, CT), Van Buskirk, Peter C. (Newtown, CT)
15/ 350,010
November 12, 2016
BACKGROUND OF THE INVENTION [0002] This invention was made with Government support under contract SC-0013116 awarded by the U.S. Department of Energy. The Government has certain rights in this invention.