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SINGLE CRYSTAL MICROMECHANICAL RESONATOR AND FABRICATION METHODS THEREOF

United States Patent Application

*** PATENT GRANTED ***
20170054432
9,641,154
A1
View the Complete Application at the US Patent & Trademark Office
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The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
Olsson, Roy H. (Albuquerque, NM), Friedmann, Thomas A. (Albuquerque, NM), Jensen Homeijer, Sara (Albuquerque, NM), Wiwi, Michael (Albuquerque, NM), Hattar, Khalid Mikhiel (Albuquerque, NM), Clark, Blythe (Albuquerque, NM), Bauer, Todd (Albuquerque, NM), Van Deusen, Stuart B. (Albuquerque, NM)
15/ 349,593
November 11, 2016
STATEMENT OF GOVERNMENT INTEREST [0002] This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.