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NANOSCALE OPTICAL TOMOGRAPHY WITH CATHODOLUMINESCENCE SPECTROSCOPY

United States Patent Application

20170052130
A1
View the Complete Application at the US Patent & Trademark Office
In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, stage a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.
Atre, Ashwin C. (Stanford, CA), Dionne, Jennifer A. (Stanford, CA), Brenny, Benjamin (Utrecht, NL), Coenen, Toon (Utrecht, NL), Polman, Albert (Utrecht, NL)
15/ 305,329
April 22, 2015
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT [0002] This invention was made with Government support under contract FA9550-11-1-0024 awarded by the Air Force Office of Scientific Research, under contract DE-EE0005331 awarded by the Department of Energy, and under contract DMR-1151231 awarded by the National Science Foundation. The Government has certain rights in the invention.