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Electropen lithography

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Brookhaven National Laboratory - Visit the Office of Technology Commercialization and Partnerships Website
The present invention relates to methods for producing a patterned surface having nanoscale features. The present invention more particularly relates to tip-induced nanoelectrochemical oxidation methods for nanoscale patterning. The invention also relates to the nanoscale patterns produced thereby.
Cai, Yuguang (Patchogue, NY), Ocko, Benjamin M. (Stony Brook, NY)
11/ 097,917
April 4, 2005
[0001] This invention was made with Government support under contract number DE-AC02-98CH10886, awarded by the U.S. Department of Energy. The Government has certain rights in the invention.