A library that comprises nanoclusters is prepared by generating nanocluster ions, mass selecting a predetermined monodisperse subset of these nanocluster ions, and depositing a plurality of them in cavities of a substrate. Members of the library may include monodisperse nanoclusters and other materials. After deposition, cavity walls may be removed.
STATEMENT REGARDING FEDERAL RIGHTS
 This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy. The government has certain rights in the invention.