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United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.
King, Danny J. (Ann Arbor, MI), Babinec, Susan (Midland, MI), Hagans, Patrick L. (Cleveland Heights, OH), Maxey, Lonnie C. (Powell, TN), Payzant, Edward A. (Oak Ridge, TN), Daniel, Claus (Knoxville, TN), Sabau, Adrian S. (Knoxville, TN), Dinwiddie, Ralph B. (Knoxville, TN), Armstrong, Beth L. (Oak Ridge, TN), Howe, Jane Y. (Oak Ridge, TN), Wood, III, David L. (Knoxville, TN), Nembhard, Nicole S. (Richmond, IN)
14/ 602,370
January 22, 2015
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT [0001] This invention was made with government support under Contract No. DE-AC05-00OR22725 awarded by the U.S. Department of Energy. The government has certain rights in the invention.