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STRUCTURALLY CONTROLLED DEPOSITION OF SILICON ONTO NANOWIRES

United States Patent Application

20150325852
A1
View the Complete Application at the US Patent & Trademark Office
Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon coating is provided. The silicon coating may include a non-conformal, more porous layer and a conformal, denser layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes, e.g., a PECVD layer to deposit the non-conformal layer and a thermal CVD process to deposit the conformal layer, are used. Anodes including the nanostructures have longer cycle lifetimes than anodes made using either a PECVD or thermal CVD method alone.
Wang, Weijie (Sunnyvale, CA), Liu, Zuqin (Sunnyvale, CA), Han, Song (Foster City, CA), Bornstein, Jonathan (Cupertino, CA), Stefan, Constantin Ionel (San Jose, CA)
14/ 710,103
May 12, 2015
STATEMENT OF GOVERNMENT SUPPORT [0002] The invention described and claimed herein was made in part utilizing funds supplied by the U.S. Department of Energy under Contract No. DE-EE0005474. The Government has certain rights in this invention.