To manufacture a nanophotonic device, a metal oxide precursor is mixed with an organic acid, an organic polymer and a photoinitiator in a solvent to form a dispersion comprising a hybrid organic-inorganic phase. A film is formed on a substrate form the dispersion, the film including the hybrid organic-inorganic phase. The film is annealed to transform the hybrid organic-inorganic phase into an inorganic phase.
STATEMENT OF GOVERNMENTAL SUPPORT
 This invention was made with government support under Contract No. DE-AC02-05CH11231 awarded by the U.S. Department of Energy, and was sponsored by the Air Force Office of Scientific Research (AFOSR), Air Force Material Command, USAF, under grant/contract number FA9550-12-C-0055. The government has certain rights in this invention.