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PROCESS AND HARDWARE FOR DEPOSITION OF COMPLEX THIN-FILM ALLOYS OVER LARGE AREAS

United States Patent Application

20140205768
A1
View the Complete Application at the US Patent & Trademark Office
Process and Hardware for Deposition of Complex Thin-film Alloys over Large Areas
Systems and methods for depositing complex thin-film alloys on substrates are provided. In particular, systems and methods for the deposition of thin-film Cd.sub.1-xM.sub.xTe ternary alloys on substrates using a stacked-source sublimation system are provided, where M is a metal such as Mg, Zn, Mn, and Cu.
Sampath, Walajabad S. (Fort Collins, CO), Kobyakov, Pavel S. (Fort Collins, CO), Walters, Kevin E. (Milliken, CO), Hemenway, Davis R. (Fort Collins, CO)
Colorado State University Research Foundation (Fort Collins CO)
14/ 246,935
April 7, 2014
GOVERNMENTAL RIGHTS IN THE INVENTION [0002] This invention was made with government support under Grant Nos. IIP0968987 and IIP1127362 awarded by the National Science Foundation. The government has certain rights in the invention.