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SUBLIMATION CRUCIBLE WITH EMBEDDED HEATER ELEMENT

United States Patent Application

20120006809
A1
View the Complete Application at the US Patent & Trademark Office
Advanced Evaporative Deposition System with Embedded Heater Element and Shutter
Systems, apparatus and methods for in-line evaporative deposition are described herein that include a nickel chromium wire based heating system that can reach desired operating temperatures while providing opportunities for improved temperature uniformity and energy usage. In some embodiments, an apparatus includes a base member configured to be used as a sublimation crucible and the base member defines a channel in a surface of the base member. A first layer of electrically insulating material is disposed within the channel and has a substantially uniform thickness. A heater coil is disposed within the channel such that the first layer of electrically insulating material is disposed between the heater coil and the surface of the base. A second layer of electrically insulating material is disposed on the heater coil such that the heater coil is disposed between the first layer of electrically insulating material and the second layer of electrically insulating material.
Kobyakov, Pavel Sergey (Fort Collins, CO), Sampath, Walajabad S. (Fort Collins, CO), Walters, Kevin Eugene (Milliken, CO)
COLORADO STATE UNIVERSITY RESEARCH FOUNDATION (Fort Collins CO)
13/ 167,479
June 23, 2011