A polymer assisted solution process for deposition of semiconductive thin films is presented. The process can be organic solvent-free. The process includes solutions of necessary metal precursors and soluble polymers. After a coating operation, the resultant coating is fired at high temperatures to yield optical quality metal oxide thin films that can be converted to semiconductive thin films.
STATEMENT REGARDING FEDERAL RIGHTS
 This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy. The government has certain rights in the invention.